The MKS Mass-Flow Controller (Model: 1179BX12CR14VSPC1) is a high-precision instrument designed to measure and control gas flow rates in various applications. This model is specifically calibrated for a full-scale flow of 100 standard cubic centimeters per minute (sccm) of nitrogen (N₂).
Key Features:
Flow Range: Capable of controlling flow rates from 2 to 100 sccm, providing precise and repeatable flow measurement and control.
Accuracy: Offers typical accuracy of ±1.0% of full scale, ensuring reliable performance.
Response Time: Features a typical settling time of less than 2 seconds, facilitating quick adjustments.
Operating Temperature: Designed to operate within a temperature range of 0°C to 50°C.
Seal Material: Equipped with Viton® seals, suitable for a wide range of gases.
Electrical Connector: Utilizes a 15-pin D-sub connector for easy integration into control systems.
Applications:
The 1179BX12CR14VSPC1 Mass-Flo Controller is ideal for:
Semiconductor Manufacturing: Precise gas flow control is essential in processes like chemical vapor deposition (CVD) and etching.
Research Laboratories: Supports experiments requiring accurate gas flow measurements.
Industrial Processes: Suitable for applications in chemical processing and other industries where gas flow regulation is critical.
