Semicon Spare Parts
VAT Gate Valve A-921102
VAT Gate Valve A-921102
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The VAT gate valve A-921102 is a high-performance vacuum isolation valve designed for ultra-high vacuum (UHV) applications in industries such as semiconductor manufacturing, research laboratories, and vacuum coating systems. While specific details for model A-921102 are limited, it is likely part of VAT's Series 108 or 121, known for their reliability and durability in demanding vacuum environments.
Key Features:
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Vacuum Compatibility: Suitable for ultra-high vacuum applications, ensuring minimal leakage and maintaining system integrity.
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Construction: Typically constructed from stainless steel with metal bellows for long service life and resistance to corrosion.
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Actuation: Available in manual or pneumatic actuation options, providing flexibility for various system requirements.
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Sealing Technology: Employs VATLOCK sealing system with FKM (Viton®) seals for reliable performance and minimal particle generation.
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Mounting: Designed for versatile mounting positions to accommodate different system configurations.
Applications:
Ideal for use in systems requiring reliable isolation of vacuum chambers, such as:
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Semiconductor fabrication equipment
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Surface analysis instruments
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Thin-film deposition systems
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Research and development vacuum setups